Our VTS300 accurately positions loads up to 450 kg, and the small volume
allows the positioning of high loads in space-constricted applications.
Typical applications range from step and settle placement to large force
generation. Multiple units can be combined for lift and tip/tilt motion.

Design Features
• Extreme load carrying capability, up to 450 kg, in a compact package
• Small stage footprint
• Lead screw does not back-drive, allowing “set and forget” operation and
excellent in-position stability
• Vacuum compatible
Outstanding Design and Construction Features
The VTS300 series stages incorporate the highest quality components to
provide superior positioning performance over a long lifetime. The base
and table are fabricated from high hardness, high stiffness special alloy
aluminum.
Pre-loaded angular contact ball-bearings support the 0.1 inch/rev precision
lead-screw. The table moves on linear motion guide bearings providing
excellent payload capability and long-life, even with heavy offset loads.
The linear bearings also provide outstanding accuracy as well as exceptional
flatness and straightness specifications over the length of travel.
Angular contact ball-bearings transmit shear forces and support excellent
translation characteristics even with heavy loads. The anodized tabletop
has a steel insert to support a tooling ball upon which the load would rest,
providing a point lift for tip/tilt configurations.
The VTS300 series stages are available with matched stepping or brushless
servomotors. The motor drives a high capacity 90° gearbox.
Options Include Vacuum Preparation for 10-6 torr
A number of options increase the flexibility of the VTS300 series stages for
a wide range of applications. Vacuum preparation for operation in vacuum
chambers to 10-6 torr is available. The stage also has movable limit switches
so that customers can adjust the travel range.
ANT95LZS stages represent the ultimate in vertical motion performance
with an ultra-low profile. Featuring dual side-mounted pneumatic
counterbalances with extremely low frictional characteristics, they are
best-in-class in combining resolution, accuracy, repeatability, size and
reliability. With their impressive dynamic capabilities and enhanced load
-carrying capacity, ANT95LZS stages are the premier choice when you
need superior quality vertical motion in a compact form factor.
Industry-Leading Motion Performance
Outstanding accuracy, position repeatability and in-position stability require
extremely fine system resolution. Available with an improved high-performance
encoder option, ANT95LZS can easily achieve minimum incremental steps of
1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling
accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing
counterbalance design opposes the gravitational forces induced by your payload,
resulting in industry-leading performance and optimum thermal stability.
Integrated Counterbalance
MPS-LZS stages are equipped with a minimally influencing pneumatic
counterbalance to offset the gravitational forces from the carriage and
payload. It includes a precision regulator for the exact dialing-in of the
counterbalancing force. Unlike spring or magnetic counterbalance
designs, the pneumatic counterbalance can be easily adjusted to exactly
offset your payload’s weight—no ballast or counterweights needed.
The counterbalance is installed standard on the left side of the stage;
however, you can easily reconfigure it for right-side operation.
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