Aerotech MPS130LZS Low-Profile Z Linear Motor Stages

MPS-LZS stages define a new benchmark for high-quality vertical motion

that breaks the traditional tradeoff between precision and price.

For demanding applications that require a careful balance of performance

and cost, you no longer have to compromise on core technology.

MPS130LZS stages feature anti-creep, crossed-roller bearings; ironless

linear motors with exceptionally high force density; and an adjustable

pneumatic counterbalance to offset up to 12 kg payload – so you get

smooth, precise motion. Plus, MPS-LZS stages are form-factor compatible

with our industry-leading ANT-LZS vertical nanopositioning stages, giving

OEMs an easy and efficient means to scale.

Design Features

• Constructed with an ironless linear motor & crossed-roller bearings for

smooth, precise motion

• Includes integrated, user-adjustable counterbalance to offset up to 12 kg

payload for precise performance in the vertical direction

• Drop-in compatibility with Aerotech ANT130LZS nanopositioners offers

seamless scalability for OEMs & machine builders

• Guaranteed performance specifications, including repeatability down to

± 0.2 µm

• Exceptional price-to-performance ratio contributes to low total cost of

ownership

• Integrates easily into multi-axis assemblies & motion systems

Key Applications

MPS-LZS stages are ideal for cost-sensitive applications that require high

precision, including:

• Photonics assembly & inspection

• Fiber alignment & optimization

• Wafer probing

• Optics manufacturing, testing & inspection

• Sensor testing & qualification

• Semiconductor processing & inspection

• Research & laboratory applications

Noncontact Direct-Drive Technology

Only noncontact direct-drive technology offers the robust, accurate and

high-speed positioning necessary for mass production of precision devices.

Compared to traditional screw-driven vertical and lift stages, MPS-LZS

stages can move and accelerate faster and more precisely. This is because

MPS-LZS stages use an ironless linear motor that eliminates cogging effects

that would otherwise cause position errors and disturbances. Coupled with

anti-creep, crossed-roller bearings, MPS-LZS delivers smooth, consistent

vertical motion with outstanding dynamic characteristics to enhance your

process capability at an attractive price point. The optimized drive and

bearing combination, packaged in a compact form factor, offers distinct

performance advantages in many applications such as high-precision

positioning, fiber alignment, optics manufacturing and inspection, sensor

testing and scanning processes that demand smooth and precise motion.

Flexible System Design

MPS-LZS stages feature convenient mounting patterns in the base and

tabletop to allow for easy system integration. Multiple stages can be

assembled together for flexible system designs and application-specific,

multi-axis configuration. Because MPS-LZS stages are form-factor, drop-in

compatible with our industry-leading family of ANT nanopositioners, you

can effortlessly combine MPS-LM and ANT stages into multi-axis systems

to achieve a balance of extreme performance and cost effectiveness.

Integrated Counterbalance

MPS-LZS stages are equipped with a minimally influencing pneumatic

counterbalance to offset the gravitational forces from the carriage and

payload. It includes a precision regulator for the exact dialing-in of the

counterbalancing force. Unlike spring or magnetic counterbalance

designs, the pneumatic counterbalance can be easily adjusted to exactly

offset your payload’s weight—no ballast or counterweights needed.

The counterbalance is installed standard on the left side of the stage;

however, you can easily reconfigure it for right-side operation.