Aerotech MPS95LZS Low-Profile Z Linear Motor Stages

MPS-LZS stages define a new benchmark for high-quality vertical motion

that breaks the traditional tradeoff between precision and price.

For demanding applications that require a careful balance of performance

and cost, you no longer have to compromise on core technology.

MPS95LZS stages feature anti-creep, crossed-roller bearings; ironless linear

motors with exceptionally high force density; and an adjustable pneumatic

counterbalance to offset up to 4 kg payload – so you get smooth, precise

motion. Plus, MPS-LZS stages are form-factor compatible with our industry

-leading ANT-LZS vertical nanopositioning stages, giving OEMs an easy and

efficient means to scale.

Design Features

• Constructed with an ironless linear motor & crossed-roller bearings for

smooth, precise motion

• Includes integrated, user-adjustable counterbalance to offset up to 4 kg

payload for precise performance in the vertical direction

• Drop-in compatibility with Aerotech ANT95LZS nanopositioners offers

seamless scalability for OEMs & machine builders

• Guaranteed performance specifications, including repeatability down to

± 0.2 µm

• Exceptional price-to-performance ratio contributes to low total cost of

ownership

• Integrates easily into multi-axis assemblies & motion systems

Key Applications

MPS-LZS stages are ideal for cost-sensitive applications that require high

precision, including:

• Photonics assembly & inspection

• Fiber alignment & optimization

• Wafer probing

• Optics manufacturing, testing & inspection

• Sensor testing & qualification

• Semiconductor processing & inspection

• Research & laboratory applications

Noncontact Direct-Drive Technology

Only noncontact direct-drive technology offers the robust, accurate and

high-speed positioning necessary for mass production of precision devices.

Compared to traditional screw-driven vertical and lift stages, MPS-LZS stages

can move and accelerate faster and more precisely. This is because MPS-LZS

stages use an ironless linear motor that eliminates cogging effects that would

otherwise cause position errors and disturbances. Coupled with anti-creep,

crossed-roller bearings, MPS-LZS delivers smooth, consistent vertical motion

with outstanding dynamic characteristics to enhance your process capability

at an attractive price point. The optimized drive and bearing combination,

packaged in a compact form factor, offers distinct performance advantages

in many applications such as high-precision positioning, fiber alignment, optics

manufacturing and inspection, sensor testing and scanning processes that

demand smooth and precise motion.

Flexible System Design

MPS-LZS stages feature convenient mounting patterns in the base and tabletop

to allow for easy system integration. Multiple stages can be assembled together

for flexible system designs and application-specific, multi-axis configuration.

Because MPS-LZS stages are form-factor, drop-in compatible with our industry

-leading family of ANT nanopositioners, you can effortlessly combine MPS-LM

and ANT stages into multi-axis systems to achieve a balance of extreme

performance and cost effectiveness.

Integrated Counterbalance

MPS-LZS stages are equipped with a minimally influencing pneumatic

counterbalance to offset the gravitational forces from the carriage and payload.

It includes a precision regulator for the exact dialing-in of the counterbalancing

force. Unlike spring or magnetic counterbalance designs, the pneumatic

counterbalance can be easily adjusted to exactly offset your payload’s weight

—no ballast or counterweights needed. The counterbalance is installed standard

on the left side of the stage; however, you can easily reconfigure it for right-side

operation.