Aerotech MPS130LM Single-Axis Miniature Linear Motor Stage

The New Standard for Value-Driven Precision

MPS-LM stages define a new benchmark for high-quality linear motion

that breaks the traditional tradeoff between precision and price. 

This makes them the ideal solution for demanding applications that

require a careful balance of performance and cost, without forcing you

to compromise on core technology. MPS-LM stages feature anti-creep,

crossed-roller bearings and ironless linear motors with exceptionally

high force density, resulting in smooth, precise motion. Plus, MPS-LM

stages are form-factor compatible with our industry-leading ANT-L

family of nanopositioning stages—offering OEMs an easy and efficient

means to scale.

Design Features

• Constructed with an ironless linear motor & crossed-roller bearings for

smooth, precise motion

• Drop-in compatibility with Aerotech ANT130L nanopositioners offers

seamless scalability for OEMs & machine builders

• Guaranteed performance specifications, including repeatability down

to ± 0.2 µm

• Exceptional price-to-performance ratio contributes to low total cost of

ownership

• Integrates easily into multi-axis assemblies & motion systems

Key Applications

MPS-LM stages are ideal for cost-sensitive applications that require high

precision, including:

• Photonics assembly & inspection

• Fiber alignment & optimization

• Wafer probing

• Optics manufacturing, testing & inspection

• Sensor testing & qualification

• Semiconductor processing & inspection

• Research & laboratory applications

Noncontact Direct-Drive Technology

Only noncontact direct-drive technology offers the robust, accurate and

high-speed positioning necessary for mass production of precision devices.

MPS-LM stages use our advanced direct-drive technology to achieve superior

positioning performance. An ironless linear motor eliminates motor cogging

effects that would otherwise cause position errors and disturbances.

Coupled with anti-creep, crossed-roller bearings, MPS-LM delivers smooth,

consistent motion with outstanding dynamic characteristics to enhance your

process capability at an attractive price point. The optimized drive and bearing

combination, packaged in a compact form factor, offers distinct performance

advantages in many applications such as high-precision positioning, fiber

alignment, optics manufacturing and inspection, sensor testing and scanning

processes that demand smooth and precise motion.

Flexible System Design

MPS-LM stages feature convenient mounting patterns in the base and tabletop

to allow for easy system integration. Multiple stages can be assembled together

for flexible system designs and application-specific, multi-axis configuration.

Because MPS-LM stages are form-factor, drop-in compatible with our industry-

leading family of ANT nanopositioners, you can effortlessly combine MPS-LM

and ANT stages into multi-axis systems to achieve a balance of nanometer-level

performance and cost effectiveness.