Our AVS1000 series stages offer the ideal solution for applications that
require moving large or heavy loads over very small incremental
movements in elevation above a horizontal plane. Low profiles and
precise motion capability make these stages ideal for use in
semiconductor manufacturing and inspection, automated tool alignment,
machine vision inspection systems and laser machining applications.

Design Features
• High-load lift stage with aperture
• Submicron closed-loop positioning
• Excellent pitch and yaw characteristics over full travel
• 5 mm or 10 mm travel; custom designs for alternate travels available
• Optional cleanroom and ESD protection
• Precision-ground ball screw for high performance
• Quality Design Provides Superior Performance
The AVS1000 series provides precise elevation of a load in a vertical plane
using a moving wedge design. The precision machined wedge block
converts horizontal movement from a precision-ground ball screw to
vertical elevation of the AVS1000 series tabletop.
Sealed linear motion guide bearings with integral wipers are incorporated
to provide excellent payload capability, long life and smooth, precision
motion. Stable and parallel vertical motion with no rocking or horizontal
deviation of the platform is ensured.
Careful design of the wedge angle and bearing system allows the AVS1000
series to achieve submicron resolution and still maintain a compact profile.
The optional factory calibration option is available to further increase standard
accuracy and repeatability.
A Better Approach to Vertical Motion
The vertical lift approach offers an alternative to traditional Z-plane oriented
stages. Not only do the AVS1000 series stages offer a lower profile, but the
load can also be accessed easily from any side. And by centering the payload
over the bearings, there are no cantilevering effects.
Motor and Drives
The AVS1000 series includes Aerotech’s high performance NEMA 34 frame-size
BMS series brushless, slotless servomotor. The slotless motor has zero cogging
and therefore is optimized for applications requiring very smooth motion.
Aerotech manufactures a wide range of matching drives and controls to provide
a fully integrated and optimized motion solution.
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