Aerotech ANT95LZS Low-Profile Z Nanopositioning Stages

ANT95LZS stages represent the ultimate in vertical motion performance

with an ultra-low profile. Featuring dual side-mounted pneumatic

counterbalances with extremely low frictional characteristics, they are

best-in-class in combining resolution, accuracy, repeatability, size and

reliability. With their impressive dynamic capabilities and enhanced load

-carrying capacity, ANT95LZS stages are the premier choice when you

need superior quality vertical motion in a compact form factor.

Design Features

• Achieves minimum incremental motion to 1 nm

• Delivers nanometer-level positioning performance over travel lengths up

to 100 mm

• Provides ultra-low profile with dual side-mounted counterbalances capable

of offsetting up to 5 kg payload for ultra-precise performance in the vertical

direction

• Features high-precision crossed-roller bearings for excellent dynamic

performance & generous load capacity

• Maximizes process throughput & reliability with ironless direct-drive linear

motor

• Available with high-resolution incremental or absolute encoders – NEW

Key Applications

• ANT95LZS is ideal for multi-axis applications that require high precision and

dynamic positioning performance, including:

• Photonics assembly & inspection

• Fiber alignment & optimization

• Optics manufacturing, testing & inspection

• Sensor testing & qualification

• Semiconductor processing & inspection

• Research & laboratory applications

Industry-Leading Motion Performance

Outstanding accuracy, position repeatability and in-position stability require

extremely fine system resolution. Available with an improved high-performance

encoder option, ANT95LZS can easily achieve minimum incremental steps of

1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling

accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing

counterbalance design opposes the gravitational forces induced by your payload,

resulting in industry-leading performance and optimum thermal stability.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-

speed positioning necessary for mass production of precision devices.

ANT95LZS stages use our advanced direct-drive technology to achieve the

highest level of positioning performance. This direct-drive technology delivers

ultra-smooth, consistent motion with outstanding dynamic characteristics to 

optimize your process throughput. The unique drive and bearing combination,

packaged in an extremely compact form factor, offers tangible advantages in

many applications such as high-precision positioning, fiber alignment, optics

manufacturing and inspection, sensor testing and scanning processes that

demand smooth and precise motion.