Aerotech ANT95LZS-025 Low-Profile Z Nanopositioning Stages

ANT95LZS stages represent the ultimate in vertical motion performance

with an ultra-low profile. Featuring dual side-mounted pneumatic

counterbalances with extremely low frictional characteristics, they are

best-in-class in combining resolution, accuracy, repeatability, size and

reliability. With their impressive dynamic capabilities and enhanced load

-carrying capacity, ANT95LZS stages are the premier choice when you

need superior quality vertical motion in a compact form factor.

Industry-Leading Motion Performance

Outstanding accuracy, position repeatability and in-position stability require

extremely fine system resolution. Available with an improved high-performance

encoder option, ANT95LZS can easily achieve minimum incremental steps of

1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling

accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing

counterbalance design opposes the gravitational forces induced by your payload,

resulting in industry-leading performance and optimum thermal stability.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-

speed positioning necessary for mass production of precision devices.

ANT95LZS stages use our advanced direct-drive technology to achieve the

highest level of positioning performance. This direct-drive technology delivers

ultra-smooth, consistent motion with outstanding dynamic characteristics to 

optimize your process throughput. The unique drive and bearing combination,

packaged in an extremely compact form factor, offers tangible advantages in

many applications such as high-precision positioning, fiber alignment, optics

manufacturing and inspection, sensor testing and scanning processes that

demand smooth and precise motion.

MPS-LZS stages define a new benchmark for high-quality vertical motion

that breaks the traditional tradeoff between precision and price.

For demanding applications that require a careful balance of performance

and cost, you no longer have to compromise on core technology.

MPS130LZS stages feature anti-creep, crossed-roller bearings; ironless

linear motors with exceptionally high force density; and an adjustable

pneumatic counterbalance to offset up to 12 kg payload – so you get

smooth, precise motion. Plus, MPS-LZS stages are form-factor compatible

with our industry-leading ANT-LZS vertical nanopositioning stages, giving

OEMs an easy and efficient means to scale.

Integrated Counterbalance

MPS-LZS stages are equipped with a minimally influencing pneumatic

counterbalance to offset the gravitational forces from the carriage and

payload. It includes a precision regulator for the exact dialing-in of the

counterbalancing force. Unlike spring or magnetic counterbalance

designs, the pneumatic counterbalance can be easily adjusted to exactly

offset your payload’s weight—no ballast or counterweights needed.

The counterbalance is installed standard on the left side of the stage;

however, you can easily reconfigure it for right-side operation.

Noncontact Direct-Drive Technology

Only noncontact direct-drive technology offers the robust, accurate and

high-speed positioning necessary for mass production of precision devices.

Compared to traditional screw-driven vertical and lift stages, MPS-LZS

stages can move and accelerate faster and more precisely. This is because

MPS-LZS stages use an ironless linear motor that eliminates cogging effects

that would otherwise cause position errors and disturbances. Coupled with

anti-creep, crossed-roller bearings, MPS-LZS delivers smooth, consistent

vertical motion with outstanding dynamic characteristics to enhance your

process capability at an attractive price point. The optimized drive and

bearing combination, packaged in a compact form factor, offers distinct

performance advantages in many applications such as high-precision

positioning, fiber alignment, optics manufacturing and inspection, sensor

testing and scanning processes that demand smooth and precise motion.