Scanlab MultiBeamScanner MBS-G4

Massive process acceleration through parallel machining

The unique combination of a precise galvano metric scanning

system and beam splitting in one system allows to multiply laser

cutting, drilling or ablation processes without loosing the freedom

of geometry of the scanner. Using diffractive opticalelements (DOEs)

the incoming laser beam is split up into multiple beams, generating

multiple laser spots in the work plane of the scanning system.

This way multpile structures can be processed in parallel or,

for example, complex cut patterns can be realized while multiplying

the production output. The MultiBeamScanner is the solution to

significatly reduce production costs in laser micromachining of periodic

structures by up to two orders of magnitude.

Wavelengths

• IR  (1030nm-1070nm)

• VIS  (515nm-532nm)

• UV  (343nm-355nm)

Suitable pulse durations

• Nanosecond / Picosecond / Femtosecond

• Max. Power: 150 W

• Max. Pulse energy: 1 mJ @ 1ps

Functions

• Masking of higher orders

• Integrated beam position stabilisation to ensure alignment

• Rotation of beam distribution

• Fine adjustment of spot pitch

• Switching between single-beam and multi-beam processing

Spot position error

• <3 µm @ f=100mm

Spot distributions

• e.g. 2×2. 4×4. …, 8x8.

user defined distributions

Galvanometer-Scanner

• Type: SCANLAB intelliSCAN III 14 or excelliSCAN 14

Control software - Photonic Tools

• Software for adjustment, calibration and control of the system

• Camera-assisted adjustment and calibration

Optional components

• Ext. camera system for intensity measurement