Scanlab Microscan Extension MSE-G2

Scan lens for ultra-high resolution applications ‚the 1μm laser knife‘

Extend your laser machine with a High-NA scanning solution

With the Microscan Extension MSE, Pulsar Photonics offers a simple but powerful extension for

any galvo scanning system. By simply exchanging a conventional scan lens with the MSE-G2. the

user can convert his machine to a micro spot scanning system. The combination of galvanometer

scanner and MSE-G2 allows high-precision processing with a focus diameter of less than 4μm.

This enables the production of the smallest components with unmatched accuracy and level of

detail. We offer the system for IR, VIS and UV wavelengths.

Technical data

• IR/VIS Version: MSE-G2 IR/VIS

• UV Version: MSE-G2 UV

• Max. Dimensions: (L x W x H): 245mm x 145mm x 120mm

• Working distance: > 20 mm (IR/VIS), > 10 mm (UV)

• Scan field size: typ. 500µm x 500µm

• Integrated coaxial camera

• Fastening thread: M85x1 (standard galvo scanner)

• Integrated collision protection

Wavelengths

• IR (1030nm-1070nm) + VIS (515nm-532nm)

• UV (343nm-355nm)

Spot sizes (for laser beam source with M²< 1.3)

• < 4µm    (IR/VIS version)

• < 2µm    (IR/VIS version)

• ≤ 1.5µm (UV version)

• LIDT coating @ 355nm; 10ps: < 0.5mJ/cm²

• LIDT coating @ 532nm; 10ps: < 3mJ/cm²

• LIDT coating @ 1064nm; 10ps: < 6mJ/cm²