Dynamic beam shaping system
Beam shape on demand
The FlexibleBeamShaper (FBS) is a machine integrable
beam shaping system for laser micromachining, that can
generate any user defined beam distributions.
To achieve this, the FBS is equipped with an electronically
controllable optical phase modulator. This allows the FBS
to be used as a photonic tool magazine with predefined
beam shapes on demand. In addition, the FBS is equipped
with a SCANLAB galvanometer scanner, so the generated
intensity distribution can be scanned over the workpiece.

These tools combined in a single system open up new
ways in laser micromaching:
faster, more flexible and more efficient.
Technical drawing and technical data
• Max. Dimensions: (L x W x H): 650mm x 680mm x 340mm
• Addressable field size with SLM: approx. 4mm x 4mm @f=100mm
Wavelengths
• IR (1030nm-1070nm)
• VIS (515nm-532nm) on request, only for low power
Laser input
• Max. beam diameter: 6 mm
• TEM00. M² ≤ 1.3
Suitable laser beam sources
• nanosecond / picosecond / femtosecond
(>800fs) (low spectral bandwidth
recommended)
• max. Power: 100 W (IR), <20W (VIS)
• max. Pulse energy: 500 µJ @ 1ps (IR)
Suppression of higher orders
Galvanometer scanner
• Type: SCANLAB intelliSCAN III 14 or excelliSCAN 14
• Focal lengths: 50mm-500mm (typ. 100mm)
Control software - Photonic Tools
• Software for adjustment, calibration and control of the system
• Camera-supported adjustment and calibration
• Software kit for creating complex profiles
• Generation of 2D and 3D distributions
• Digital tool-changing system
Optional components
• Switching between single beam and multiple beam processing
• Motorized alignment of laser beam into the module
• Coaxial camera
• Ext. Camera system for intensity measurement
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