ZeGage™ Pro Production-ready 3D Optical Profiler System

ZeGage™ Pro Production-Ready 3D Optical Profiler System

ZeGage Pro HR 3D Optical Profiler

The ZeGage™ Pro and ZeGage™ Pro HR 3D Optical Profilers provide non-contact measurement and characterisation of micron and nanometre scale features on a wide range of surface types.

non-contact measurement and characterisation of micron and nano-scale features on a wide range of surface types for quality control and process monitoring in manufacturing environments.

Our industry-leading ZeGage Pro series sets the industry standard for benchtop industrial non-contact surface profilers due to its superior performance, ease of use, flexibility and accuracy.

The ZeGage Pro builds on ZYGO's proprietary CSI technology with a range of innovations for accurate, reliable, simple and hassle-free surface measurement.

Unique features include SureScan™ anti-vibration metrology technology, Part Find and Smart Setup to simplify part setup and optimise measurement.

Measuring a wide range of surfaces and parts quickly and easily has never been easier.

Powerful performance

Proprietary non-contact metrology enhanced by SureScan™ technology that is vibration insensitive and can be placed anywhere in the plant.

Quantitative surface metrology with nanometre accuracy provides superior metrology capabilities.

The 1.9 megapixel high resolution image sensor quickly measures surface areas in seconds, providing excellent surface detail for visualisation.

Fully automated measurement sequences and on-site stitching enable high-resolution inspection of large areas. (Requires optional motorised stage.)

Versatility

Measurement of a wide range of surface materials and parameters, including 2D and 3D analysis of surface texture, morphology, step height, and more.

The included Mx software provides comprehensive tools for surface data visualisation, analysis and reporting.

Measurement ranges can be extended with accessories including objective turntables, manual and motorised sample stages, optional thin film analysis software.

and an optional software module for 2D image analysis analysis using Cognex VisionPro®.

Productivity and Cost Effectiveness

Smart Setup technology reduces training time and shortens part changeover time by automatically finding interference fringes on the part surface, setting the light intensity and configuring the scan length.

Smart Setup typically generates the first data plot within 1 minute of the sample being placed under the objective.

Cost-effective compared to other systems, including mechanical contact stylus profilers.

The non-contact approach means there are no consumable replacement costs to worry about.

Compact, vibration-resistant SureScan™ technology that can be easily integrated anywhere in the factory.