ZYGO Nexview™ 650: Large Format Inspection & Metrology

The Nexview™ 650 metrology system is an inspection tool for automated

measurement of injection molding tooling, PCBs, glass panels and other

samples requiring an extended work volume up to 650 x 650 mm.

It provides 2D & 3D measurements of a variety of surface features with

sub-nanometer vertical precision and sub-micron lateral precision.

Powerful Performance

Coherence Scanning Interferometry (CSI) is the measurement technology

at the core of the Nexview™ 650 system.

This non-contact technique provides high-precision, and high-value surface

metrology benefits including:

• Measures virtually all types of surfaces, from rough to super smooth,

including thin films, steep slopes, and large steps.

• Sub-nanometer measurement precision is independent of field magnification

• Gage capable performance - exceptional precision and repeatability for the

most demanding production applications.

• SureScan™ vibration tolerance technology - robust operation in virtually any

environment.

• Mx™ software enables seamless data exchange with other ZYGO Profilers

including ZeGage™ Pro, NewView™ 9000. and Nexview™ NX2.

Maximize ROI

The Nexview™ 650 has been designed and built to ensure that the system

provides value for years to come.  With a metrology area that accommodates

lateral dimensions up to 650 x 650 mm and sample load of > 100 kg,

a vertical range of 150 mm, and options for a fully enclosed, or partially

enclosed system, the Nexview™ 650 provides maximum flexibility for large

samples that require precision 3D optical profiling.

For example. The system accommodates:

Any of today's standard PCB substrate panel sizes

Custom defined sample holders for flexible sheets, etc. which can be deployed

with little concern for their mass on the high load Y stage Large, high mass

injection molding plates that benefit from precise non-contact inspection to

minimize potential precision surface damage Customized chucks and sample

holders can be designed or customer supplied to adapt the system for smaller

panels or even singulated substrates to maximize application flexibility.

And the system's integrated recipe-driven automation software enables

hands-free metrology of multiple features on each panel, all in a single

workstation, reducing production time and increasing process knowledge.