ZYGO’s most flexible, powerful, and robust non-contact surface profiler

Nexview™ NX2 profi ler product highlights

An all-new advanced non-contact 3D imaging and metrology

tool—with high fi delity surface mapping and visualization—

for surface applications demanding precise quantitative,

topographic, volumetric, and texture characterization.

Superior measurement visualization, capabilities, and performance

Nexview™ NX2 profi ler represents a signifi cant advantage over

other metrology methods. A fully automated optical head makes

confi guration of advanced metrology applications easy, robust

and repeatable. Interactive user-confi gurable data plots reveal

surface characteristics through traditional 2D and 3D plots,

as well as more advanced slope analysis, PSD, and true color imaging.

Whether for measurement precision, speed, robust performance,

or visualization, the Nexview NX2 profi ler is the ideal choice.

Mx software is ZYGO’s platform for instrument control and data analysis.

Using a simple workfl ow based concept, users easily navigate the metrology

experience from setup through analysis and reporting.

Interactive and detailed plots show full 2D or 3D data; profi le slices,

material ratio, slope analysis, and PSD views. With built-in SPC,

pass/fail indication, data reporting and run charts, production quality

analysis is simple.

Features

Multiple data collection techniques provide maximum application fl

exibility— for surface heights from angstroms to millimeters

SureScan™ technology enables precision metrology in vibration-prone

environments

Smart PSI technology enables sub-Å surface metrology in seconds

Correlation to 2D and 3D standards with compliance to ISO 25178

topography results

Streamlined Mx™ software

Built in pass/fail, SPC, reporting, and run statistics

Built in pneumatic vibration isolation

Open structure provides clear part visibility and access

Built in 75 mm head riser accommodates taller samples

Optional thick fi lms analysis for transparent films >400 nm thick

Optional advanced thin fi lms software for films 50-1000 nm

Optional 2D analysis Vision Software Suite

Performance Surface Topography Repeatability

0.06 nm for all magnifi cations

Repeatability of the RMS

0.005 nm

Sample Stage

XY travel:  200 mm

Tilt:  +/- 4°

Capacity:  20 lbs

System Options

Encoded XYZ stages

200x325 mm long travel XY stage

Theta stage

Physical Characteristics

Dimensions (H x W x D)

146 × 73 × 61 cm (57.48 × 28.74 × 24.02 in)

System Weight

248 kg (547 lbs)

Flexible Confi gurations

Gantry Risers

Optional 50 mm (2 in.) and 150 mm (6 in.)

base riser kits work with the included 75 mm head riser to increase standard

work volume by more than 8 inches, to enable access to very large parts and

deeply recessed surfaces.

Software

Additionally, optional software licenses for vision analysis and transparent films

analysis enable multifunctional tool use for a wider variety of applications such

as materials characterization, precision machining, prosthetics, MEMS, semiconductor,

consumer electro-optics, and opticalsurface manufacturing.

Objectives

ZYGO maintains the largest selection of interferometric objectives including:

• Standard working distance objectives from 1× to 100× magnifi cation.

Our 100× objective with 0.85 NA has the fi nest optical resolution of any

interferometricprofi ler.

• Long working Distance (LWD), and superlong working distance (SLWD)

objectives from 1× to 10× magnifi cation.

• Specialized glass compensated (GC) objectives enable sample observation

through a transmissive window.