Go with the flow of engineering leadership. All airflow sensorsoperate on heat transfer
— flow and differential pressure.
But Honeywell Sensing and Control (S&C) offers advanced chip design, manufacturing
techniques and microstructure technology, allowing our microbridge to be notably faster,
smaller and more sensitive. Our silicon chip design is created from a thin film, thermally
isolated bridge structure, containing both heater and temperature sensing elements.
This provides rapid response to the air or gas flow and amount and direction, delivering
a proportional output voltage. Amplified versions provide an enhanced output signal
and less external circuitry, while unamplified versions allow additional external circuit
options.
What’s more, a variety of port styles provides greater application flexibility.

FEATURES
HonEywEll ZEpHyR™ AiRFlow SEnSoRS
HAF Series-High Accuracy.
±50 SCCM to ±750 SCCM
Features: Total Error Band (TEB) as low as±0.25 %FSS • Fast response time
• Wide range of airflows • Customizable flow ranges and configurable package
styles • Full calibration and temperature compensation • High sensitivity at very
low flows • Linear output • High stability • Low pressure drop • High 12-bit
resolution (digital), 0.039 %FS resolution (analog) • Low 3.3 Vdc operating
voltage • ASIC-based I2C output compatibility (digital)
• Insensitivity to mounting orientation • Insensitivity to altitude • Small size
• RoHS-compliant materials
Benefits: Total Error Band (TEB) as low as ±0.25 %FSS allows for precise airflow
measurement, often ideal for demanding applications with high accuracy
requirements. Fast response time allows a customer’s application to respond
quickly to airflow change, important in critical medical (e.g., anesthesia) and
industrial (e.g., fume hood) applications. Measures mass flow at standard flow
ranges of ±50. ±100. ±200. ±400 or ±750 SCCM, or custom flow ranges,
increasing the options for integrating the sensor into the application.
Customizable flow ranges and configurable package styles meet specific end-user
needs. Full calibration and temperature compensation typically allow customer
to remove additional components associated with signal conditioning from the PCB,
reducing PCB size as well as costs often associated with those components (e.g.,
acquisition, inventory, assembly). High sensitivity at very low flows provides for
faster response time at the onset or cessation of flow. Linear output provides
a more intuitive sensor signal than the raw output of basic airflow sensors,
which can help reduce production costs, design, and implementation time. High
stability reduces errors due to thermal effects and null shift to provide accurate
readings over time, often eliminating need for system calibration after PCB
mount and periodically over time. Low pressure drop typically improves patient
comfort in medical applications, and reduces noise and system wear on other
components such as motors and pumps. High 12-bit resolution (digital) increases
ability to sense small airflow changes, allowing customers to more precisely control
their application; 0.039 %FS resolution (analog) increases ability to sense small
airflow changes, allowing customers to more precisely control their application.
Low 3.3 Vdc operating voltage option and low power consumption allow for use
in battery driven and other portable applications. ASIC-based I2C digital output
compatibility eases integration to microprocessors or microcontrollers, reducing
PCB complexity and component count. Insensitivity to mounting orientation allows
customer to position the sensor in most optimal point in the system, eliminating
concern for positional effects. Insensitivity to altitude eliminates customer-implemented
altitude adjustments in the system, easing integration and reducing
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