Aerotech ALS130H Series Mechanical Bearing, Direct-Drive Linear Stage

Bi-directional repeatability to 75 nm

Direct-drive linear motor for ultra-precise motion

High-accuracy noncontact glass scale linear encoder

Anti-cage creep cross-roller bearings for smooth motion

Outstanding performance in a small footprint

The ALS130H, with its sub-nanometer resolution, superior

bi-directional repeatability, and exceptional low-velocity

performance, is the unparalleled solution for high

performance test, measurement, inspection, and other

demanding applications.

Linear Motor Drive

Unlike many stages that utilize a side-drive lead screw, the

ALS130H employs a center-driven, non-cogging linear

motor as the driving element. Since the linear motor is a

direct-drive device, there is no backlash, windup, or

"stiction" that is normally associated with a lead screw or

ball-screw drive.

The linear motor drive also offers the advantage of higher

speeds and accelerations. The compact yet powerful linear

motor drives the ALS130H to a peak unloaded acceleration

of 1 g and a maximum velocity of 300 mm/s. The result is a

high-performance stage with outstanding throughput that

significantly outperforms comparable high-accuracy screwdriven stages.

Exceptional Resolution

For alignment applications, outstanding step-to-step

resolution is critical. The ALS130H meets this demand with

a resolution of 0.5 nm when coupled with Aerotech

controls.

The direct-drive linear motor allows the ALS130H to make

precise, small resolution steps. This is particularly

important in alignment applications where step accuracy is

Bi-directional repeatability to 75 nm

Direct-drive linear motor for ultra-precise

motion

High-accuracy noncontact glass scale linear

encoder

Anti-cage creep cross-roller bearings for

smooth motion

Outstanding performance in a small footprint

critical. Furthermore, the linear motor and high resolution

encoder system also provides excellent in-position stability.

Superior Geometry

Aerotech's ultra-stiff construction and compact two-piece

design result in a stage with unmatched geometrical

tolerances. As a result, straightness and flatness for the

standard stage is <±2 µm over the entire travel.

Smooth Travel

Designed for smooth, vibration-free motion, the ALS130H

utilizes precision anti-cage creep cross-roller bearings for

outstanding smoothness of motion. Since neither the

bearing system nor the drive system utilize any

recirculating elements, the ALS130H exhibits the

outstanding ripple-free motion required for scanning and

inspection applications.

Designed for Long Life

Like all stages in the Aerotech product family, the

ALS130H was designed for outstanding long-term

performance. Both the linear motor and linear encoder are

noncontact devices - they not only exhibit long-life, but are

totally maintenance free. A moving magnet track design

eliminates the need for cable management, further

improving long-term reliability.

Precision Alignment

ALS130H series stages are easily configured as XY

assemblies. Options include precision orthogonality

alignment to 5 arc seconds and available vertical axis solutions.